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Pt Nanocrystals with Remote Plasma Atomic Layer Deposited HfO2 for Nonvolatile Memory Devices

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Pt Nanocrystals with Remote Plasma Atomic Layer Deposited HfO2 for Nonvolatile Memory Devices
저자
전형탁
발행일
2009-04-13
학회명
MRS 2009 spring meeting
개최지
San Francisco, CA USA

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