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Design and Development of a Hollow-Anode Discharge Source for Sputtering Process

  • 정규선
제목
Design and Development of a Hollow-Anode Discharge Source for Sputtering Process
저자
정규선
발행일
2014-12-11
학회명
The 17th International Symposium on the Physics of Semiconductors and Applications
개최지
제주도/대한민국

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