ScholarWorks@한양대학교

상세 보기

Nanotopography impact and planarization efficiency of ceria slurry for STI-CMP

제목
Nanotopography impact and planarization efficiency of ceria slurry for STI-CMP
저자
백운규
발행일
2004-04-08
학회명
춘계 한국전기화학회
개최지
한국에너지기술연구원

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.