ELECTRON MOBILITY ENHANCEMENT OF NANO-THICKNESS OF STRAINED SILICON GROWN ON RELAXED SiGe LAYER ON INSULATOR

  • 박재근
제목
ELECTRON MOBILITY ENHANCEMENT OF NANO-THICKNESS OF STRAINED SILICON GROWN ON RELAXED SiGe LAYER ON INSULATOR
저자
박재근
발행일
2003-11-14
학회명
ADVANCED CRYSTAL GROWTH CONFERENCE AND 2003 INTERNATIONAL SYMPOSIUM ON SUBSTRATE ENGINEERING
개최지
한양대학교