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Dependence of Nickel Gettering on Crystalline nature in as-grown CZ silicon wafer

  • 박재근
제목
Dependence of Nickel Gettering on Crystalline nature in as-grown CZ silicon wafer
저자
박재근
발행일
2008-10-10
학회명
The First Joint Workshop between Beijing University of Posts and Telecommunications and Hanyang Univ
개최지
Beijing, China

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