Nano-Cantilever structure using carbon nanotubes

초록

To realize electromechanical applications using carbon nanotubes, we have fabricated a nanoelectromechanical device consisted of suspended multi wall carbon nanotube (MWNT) and metal electrodes. The device was designed to be switched between suspended MWNT and pull-in electrode by transiently charging the nanotube and pull-in electrode to produce attractive electrostatic forces. Nanotubes were dispersed on SiO2 coated Si wafer, after mapping process, and contact electrodes and pull-in electrode were formed by electron beam lithography and sputtering