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The effect of Heat treatment on the emission of amorphous carbon film deposited by RF magnetron sputtering method
- 제목
- The effect of Heat treatment on the emission of amorphous carbon film deposited by RF magnetron sputtering method
- 저자
- 안진호
- 발행일
- 2000-01-17
- 학회명
- 한국반도체학술대회
- 개최지
- 고려대