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Chemical composition analysis and optimal deposition CVD Hf-B-C coating by thermodynamic calculation from HfCl4-C3H6-BCl3-Ar-H2
- 제목
- Chemical composition analysis and optimal deposition CVD Hf-B-C coating by thermodynamic calculation from HfCl4-C3H6-BCl3-Ar-H2
- 저자
- 신동욱
- 발행일
- 2024-10-16
- 학회명
- 2024 Fall meeting 한국세라믹학회 추계학술대회
- 개최지
- 서울 코엑스