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초록
The corrosion inhibition effect of different nonionic polymers, which are polyacrylamide (PAM), polyvinyl pyrrolidone (PVP), and polyvinyl alcohol (PVA), on polycrystalline Ge2Sb2Te5 (pc-GST) was investigated in an alkaline media for chemical mechanical planarization. The adsorption affinity and inhibition effect of nonionic polymers on pitting corrosion were observed using x-ray photoelectron spectroscopy and a potentiodynamic polarization curve, respectively. We found that PVP was more effective than the others in inhibiting the pitting corrosion of pc-GST film in the alkaline media.
키워드
Adsorption; Alkalinity; Antimony; Germanium; Pitting; Polymers; X ray photoelectron spectroscopy
- 제목
- Effect of Nonionic Polymer as Corrosion Inhibitor in Alkaline Media for Polycrystalline Ge2Sb2Te5 Chemical Mechanical Planarization
- 저자
- Cho, Jong-Young; Cui, Hao; Park, Jin-Hyung; Park, Hyung-Soon; Park, Jea-Gun
- 발행일
- 2011-09
- 유형
- Article
- 권
- 14
- 호
- 11
- 페이지
- H450 ~ H452