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Atomic Layer Deposited Y2O3 Film with Novel Liquid Y-Precursor and its Application to Resistive Switching Device
- 제목
- Atomic Layer Deposited Y2O3 Film with Novel Liquid Y-Precursor and its Application to Resistive Switching Device
- 저자
- 안진호
- 발행일
- 2012-06-18
- 학회명
- AVS12th International Conference on Atomic Layer Deposition
- 개최지
- 독일