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Adhesion of Pt/Ti Thin Film on Poly-Si/SiO2/Si and SiO2/Si substrates

  • 김영호
제목
Adhesion of Pt/Ti Thin Film on Poly-Si/SiO2/Si and SiO2/Si substrates
저자
김영호
발행일
1997-08-01
학회명
The 9th Inter.Meeting on Ferroelectricity

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