Memory characteristics of Au nanocrystals embedded in remote plasma atomic layer deposited Al2O3 FOR nonvolatile memory applications

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Memory characteristics of Au nanocrystals embedded in remote plasma atomic layer deposited Al2O3 FOR nonvolatile memory applications
저자
전형탁
발행일
2010-08-19
학회명
IEEE NANO 2010(10th IEEE International conference on nanotechnology)
개최지
KINTEX, Korea