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Characterization and calibration of a capacitive diaphragm gauge manometer for the measurement of dust particles in TReD(Transport and Removal experiment of dust) device

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Characterization and calibration of a capacitive diaphragm gauge manometer for the measurement of dust particles in TReD(Transport and Removal experiment of dust) device
저자
정규선
발행일
2013-02-02
학회명
The 6th International Conference on PLAsma NanoTechnology & Science
개최지
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