ScholarWorks@한양대학교

상세 보기

Effects of Grain Size and Molecular Weight of Surfactant in Nano-Ceria Slurry on Removal Selectivity of SiO2/Si3N4 Films on Pattern Wafers

  • 박재근
제목
Effects of Grain Size and Molecular Weight of Surfactant in Nano-Ceria Slurry on Removal Selectivity of SiO2/Si3N4 Films on Pattern Wafers
저자
박재근
발행일
2005-06-09
학회명
china NANO 2005
개최지
중국 베이징

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.