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- 제목
- Effect of Wafer Thickness and Damage Layet Thickness on Residual Stress and Bow of Free-standing Gallium Nitride Wafers
- 저자
- 박재근
- 발행일
- 2017-11-22
- 학회명
- 7th International Symposium for Advanced Functional Materials & Devices
- 개최지
- SUMCO Kyushu Factory (Imari)