Nano-scale metal-oxide-nitride-oxide-silicon NAND flash memory devices utilizing a metal spacer

  • 김태환
제목
Nano-scale metal-oxide-nitride-oxide-silicon NAND flash memory devices utilizing a metal spacer
저자
김태환
발행일
2010-11-08
학회명
International Conference On Nano Science and Nano Technology (ICNST2010)
개최지
Oryonghall, Gwangu Institute of Science And Technology(GIST), Gwangu ,Korea