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- 제목
- The Effects of Water-Soluble Oragnic Additives on the Rhelogical Behavior of Colloidal Silica Slurry and Its Influence on Wafer Polishing Process
- 저자
- 박재근
- 발행일
- 2004-06-04
- 학회명
- International Conference on Crystal Growth And LED Epi and Substrate
- 개최지
- Sungkyunkwan University, Suwon, Korea