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Fabrication of Two- dimensional Periodic Structures in Amorphous Silicon Film by Femtosecond Laser Interface Lithography

  • 김은규
제목
Fabrication of Two- dimensional Periodic Structures in Amorphous Silicon Film by Femtosecond Laser Interface Lithography
저자
김은규
발행일
2006-04-20
학회명
2006년 한국물리학회 봄 학술논문발표회
개최지
휘닉스파크

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