Enhancement of the device characteristics for nanoscale charge trap flash memory devices utilizing a metal spacer layer

  • Kim, Hyun Woo
  • You, Joo Hyung
  • Lee, Dea Uk
  • Kim, Tae Whan
  • Lee, Keun Woo
Citations

SCOPUS

0

초록

Nanoscale charge trap flash (CTF) memory devices with a metal spacer layer were designed to decrease the interference effect and to increase the fringing field effect and the coupling ratio. The optimum metal spacer depth of the memory devices was determined to enhance the device performance of the memory devices. The drain current and the threshold voltage shifts of the CTF memory devices were increased due to an increase in the fringing field and the coupling ratio resulting from the existence of the optimized metal spacer. The interference effect between neighboring cells was decreased due to the shielding of the electric field resulting from the existence of the metal spacer layer.

키워드

charge trap flash memorycoupling ratiofringing fieldinterference effectCharge trap flash memoriescoupling ratioCoupling ratiosDevice characteristicsDevice performanceFringing field effectsFringing fieldsinterference effectInterference effectsNano scaleSpacer layerThreshold voltage shiftsCharge trappingDrain currentElectric fieldsEquipmentFlash memoryMetalsNanostructured materialsNanotechnologyThreshold voltageField effect semiconductor devices
제목
Enhancement of the device characteristics for nanoscale charge trap flash memory devices utilizing a metal spacer layer
저자
Kim, Hyun WooYou, Joo HyungLee, Dea UkKim, Tae WhanLee, Keun Woo
DOI
10.1109/SISPAD.2011.6035086
발행일
2011-09
유형
Conference Paper
저널명
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
페이지
203 ~ 206