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The Control of the potentiodynamic behavior of W film for the suppression of the corning on W plug in W CMP for memory devices beyond 50nm
- 제목
- The Control of the potentiodynamic behavior of W film for the suppression of the corning on W plug in W CMP for memory devices beyond 50nm
- 저자
- 백운규
- 발행일
- 2009-08-27
- 학회명
- Nano Korea 2009
- 개최지
- KINTEX, Goyang, Korea