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Improved Barrier Property and Controllability of Laterally Mixed Nanostructure using Plasma-Enhanced Atomic Layer Deposition
- 제목
- Improved Barrier Property and Controllability of Laterally Mixed Nanostructure using Plasma-Enhanced Atomic Layer Deposition
- 저자
- 박진성
- 발행일
- 2020-08-25
- 학회명
- IMID 2020