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Design and Modeling of a Microwave Plasma Enhanced Chemical Vapour Deposition System for Growth of Diamond Films
- 제목
- Design and Modeling of a Microwave Plasma Enhanced Chemical Vapour Deposition System for Growth of Diamond Films
- 저자
- Ming-Chieh Lin
- 발행일
- 2024-06-19
- 학회명
- The 51st IEEE International Conference on Plasma Science (ICOPS)
- 개최지
- Beijing, China