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The Impact of Oxygen Reactants on ALD InOx films using novel dimethyl[N1-(tert-butyl)-N2,N2-dimethylethane-1,2-diamine]indium precursor
- 제목
- The Impact of Oxygen Reactants on ALD InOx films using novel dimethyl[N1-(tert-butyl)-N2,N2-dimethylethane-1,2-diamine]indium precursor
- 저자
- 박진성
- 발행일
- 2022-06-28
- 학회명
- ALD 2022