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The impact of thermal-assist UV/Ozone treatment in amorphous zinc oxynitride thin film transistors
- Ok, Kyung-chul;
- Jeong, Hyun-Jun;
- Lee, Hyun-mo;
- Park, Jin Seong
Citations
SCOPUS
0초록
We fabricated high mobility (μsat > 40cm2A/s) and stable (ΔVm < ± 1V @PBS and NBS for 1hr) amorphous zinc oxynitride thin film transistors (a-ZnON TFTs) using thenrial assist UV/ozone treatment. The electrical characteristics of a-ZnON TFTs were investigated by chemical bonding properties.
키워드
Instability; Low temperature; Oxynitride; Thin film transistors; UVO; Amorphous films; Chemical bonds; Nitrides; Plasma stability; Temperature; Thin film circuits; Thin films; Zinc compounds; Chemical bondings; Electrical characteristic; High mobility; Low temperatures; Oxynitrides; Thermal assist; UV/ozone treatment; Zinc oxynitride; Thin film transistors
- 제목
- The impact of thermal-assist UV/Ozone treatment in amorphous zinc oxynitride thin film transistors
- 저자
- Ok, Kyung-chul; Jeong, Hyun-Jun; Lee, Hyun-mo; Park, Jin Seong
- 발행일
- 2015-12
- 유형
- Conference Paper
- 저널명
- Proceedings of the International Display Workshops
- 권
- 2
- 페이지
- 660 ~ 661