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Effects of Calcination Process to Control the Abrasive Particles in Nano Ceria Slurry for STI CMP

  • 박재근
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Effects of Calcination Process to Control the Abrasive Particles in Nano Ceria Slurry for STI CMP
저자
박재근
발행일
2007-04-20
학회명
한국물리학회 2007년 봄 학술논문발표회
개최지
휘닉스파크

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