Self-Aligned Fabrication of Sub-50 nm Top Gate Coplanar IGZO/ITO Thin-Film Transistors without Nanoscale Patterning

제목
Self-Aligned Fabrication of Sub-50 nm Top Gate Coplanar IGZO/ITO Thin-Film Transistors without Nanoscale Patterning
저자
이승백
발행일
2024-04-24
학회명
2024 MRS spring meeting
개최지
Seattle Convention Center, Seattle Washington, USA