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Self-Aligned Fabrication of Sub-50 nm Top Gate Coplanar IGZO/ITO Thin-Film Transistors without Nanoscale Patterning
- 제목
- Self-Aligned Fabrication of Sub-50 nm Top Gate Coplanar IGZO/ITO Thin-Film Transistors without Nanoscale Patterning
- 저자
- 이승백
- 발행일
- 2024-04-24
- 학회명
- 2024 MRS spring meeting
- 개최지
- Seattle Convention Center, Seattle Washington, USA