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Improvement of Surface Characteristics of Relaxed SiGe layer on Insulator Substrate by Post Annealing

  • 박재근
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Improvement of Surface Characteristics of Relaxed SiGe layer on Insulator Substrate by Post Annealing
저자
박재근
발행일
2011-10-20
학회명
2011 한국물리학회 가을학술논문발표회
개최지
부산 BEXCO

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