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Design and Modeling of a Microwave Plasma Enhanced Chemical Vapour Deposition System with Quartz Glass Barriers for Industrial Applications
- 제목
- Design and Modeling of a Microwave Plasma Enhanced Chemical Vapour Deposition System with Quartz Glass Barriers for Industrial Applications
- 저자
- Ming-Chieh Lin
- 발행일
- 2024-10-07
- 학회명
- The 66th Annual Meeting of the APS Division of Plasma Physics
- 개최지
- Atlanta, Georgia