ScholarWorks@한양대학교

상세 보기

Measurement of Negative Ion in SF6/Ar DC Plasmas using Cylindrical Probe and Planar Probe

  • 정규선
제목
Measurement of Negative Ion in SF6/Ar DC Plasmas using Cylindrical Probe and Planar Probe
저자
정규선
발행일
2013-01-17
학회명
2013 플라즈마 과학 및 공학도 교류회

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.