In-situ Spectroscopic Analysis of Surface Doping on 2D MoS2 for Channel Materials

제목
In-situ Spectroscopic Analysis of Surface Doping on 2D MoS2 for Channel Materials
저자
최선진
발행일
2023-11-20
학회명
Korean International Conference on Semiconductor Manufacturing Technology (KISM 2023)
개최지
부산 파라다이스 호텔