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Effects of amorphous-silicon and poly-silicon films on within-wafer non-uniformity(WIWNU) improvement in chemical mechanical polishing
- 제목
- Effects of amorphous-silicon and poly-silicon films on within-wafer non-uniformity(WIWNU) improvement in chemical mechanical polishing
- 저자
- 백운규
- 발행일
- 2006-05-19
- 학회명
- 2006년도 춘계 한국재료학회
- 개최지
- 경상대학교