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A New Nonlinear Parameter Estimation and Its Application to Critical Dimension Measurements in a Semiconductor Industry
- 제목
- A New Nonlinear Parameter Estimation and Its Application to Critical Dimension Measurements in a Semiconductor Industry
- 저자
- 박철진
- 발행일
- 2016-12-16
- 학회명
- The 2nd Pacific Rim Statistical Conference for Production Engineering Production Engineering, Big Data & Statistics
- 개최지
- International Conference Room, Building 25-1, Seoul National University