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Design of mask grating for obtaining the effect of an off-axis illumination in optical lithography
- Kim, Young-Seok;
- Song, Seok Ho;
- Oh, Sung Hyun;
- Choi, Yong Kyu;
- O, Beom Hoan;
- 외 3명
Citations
SCOPUS
1초록
We proposed the new method for obtaining the effect of an off-axis illumination by using a mask grating formed on the photo mask. The grating structure was designed from the source distribution in the conventional off-axis illumination and the rigorous diffraction theory. Its performance was characterized with simulated Bossung curve.
키워드
Lithography; Electro-optics; Off-axis-illumination; Pacific Rim; Light
- 제목
- Design of mask grating for obtaining the effect of an off-axis illumination in optical lithography
- 저자
- Kim, Young-Seok; Song, Seok Ho; Oh, Sung Hyun; Choi, Yong Kyu; O, Beom Hoan; Park, Se Geun; Lee, El Hang; Lee, Seung Gol
- 발행일
- 2007-08
- 유형
- Conference Paper
- 저널명
- Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
- 페이지
- 1 ~ 2
- 언어
- ENG
- 출판사
- IEEE
- 발행국가
- 미국
- 분량
- 2 페이지
- ISSN
- P 0000-0000