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high mobility p-type ZnO:AlN thin films on sapphire substrate with pre-activated nitrogen radicals
초록
1
- 제목
- high mobility p-type ZnO:AlN thin films on sapphire substrate with pre-activated nitrogen radicals
- 저자
- 홍진표
- 발행일
- 2008-08-18
- 학회명
- 1st internationsl conference on microelectronics and plasma technology
- 개최지
- 제주도