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Crystallinity and energy band structure of atomic layer deposited ZrO2 films using Cp-Zr precursor

  • 전형탁
제목
Crystallinity and energy band structure of atomic layer deposited ZrO2 films using Cp-Zr precursor
저자
전형탁
발행일
2015-05-14
학회명
2015 한국재료학회 춘계학술대회
개최지
GumiCo

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