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A New Approach to Atomic Layer Etching of Indium Oxide Thin Films via Ligand Addition and O₂ Plasma Reactions
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- A New Approach to Atomic Layer Etching of Indium Oxide Thin Films via Ligand Addition and O₂ Plasma Reactions
- 저자
- 박진성
- 발행일
- 2025-06-24
- 학회명
- ALD/ALE 2025
- 개최지
- ICC JEJU