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Nitrogen Behaviors in PEALD-grown SiO2 Films Using N2O Plasma Reactant and Its Application in ALD-IZO TFTs
- 제목
- Nitrogen Behaviors in PEALD-grown SiO2 Films Using N2O Plasma Reactant and Its Application in ALD-IZO TFTs
- 저자
- 박진성
- 발행일
- 2022-05-09
- 학회명
- SID Display Week 2022