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High-Transmittance SiC Membrane Prepared By ECR Plasma CVD In Combination With Rapid Thermal Annealing
- 제목
- High-Transmittance SiC Membrane Prepared By ECR Plasma CVD In Combination With Rapid Thermal Annealing
- 저자
- 안진호
- 발행일
- 1998-07-13
- 학회명
- Microprocesses and Nanotechnology Conference, 1998 International
- 개최지
- 경주