Analysis of chemical bond states and electrical properties from stack AlON/HfO2 gate oxides formed by a layer-by-layer technique

제목
Analysis of chemical bond states and electrical properties from stack AlON/HfO2 gate oxides formed by a layer-by-layer technique
저자
남창우
발행일
2005-12-05
학회명
ICAMD 2005
개최지
라마다 플라자 제주 호텔