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Characteristics of TiO2 thin film by remote plasma atomic layer deposition using a novel Ti precursor

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Characteristics of TiO2 thin film by remote plasma atomic layer deposition using a novel Ti precursor
저자
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발행일
2014-11-28
학회명
2014년도 한국재료학회 추계학술대회
개최지
대전컨벤션센터

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