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Structural study of plasma deposited carborane(C2B10H12) film on Si wafer

제목
Structural study of plasma deposited carborane(C2B10H12) film on Si wafer
저자
김재용
발행일
2011-04-20
학회명
2011 한국물리학회 봄 학술대회
개최지
평창, 휘닉스파크

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