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Design of Extremely Proximity Gettering using MeV-nitrogen Ion Implantation for Si C-MOS Image Sensor

  • 박재근
제목
Design of Extremely Proximity Gettering using MeV-nitrogen Ion Implantation for Si C-MOS Image Sensor
저자
박재근
발행일
2012-05-10
학회명
2012 SiWEDS Spring Meeting
개최지
Sheraton Seattle Hotel, Seattle, USA

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