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Hydrogen-Resistant IGZO TFT with Nitrogen-Engineered SiO2 Gate Insulator via PEALD

제목
Hydrogen-Resistant IGZO TFT with Nitrogen-Engineered SiO2 Gate Insulator via PEALD
저자
박진성
발행일
2025-12-05
학회명
IDW25
개최지
일본 히로시마

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