상세 보기
Difference of Growth Behaviors for Plasma Enhanced ALD In2O3 Layer Using Novel Indium Precursors Based on Alkyl and Amine Ligand
- 제목
- Difference of Growth Behaviors for Plasma Enhanced ALD In2O3 Layer Using Novel Indium Precursors Based on Alkyl and Amine Ligand
- 저자
- 박진성
- 발행일
- 2023-11-22
- 학회명
- KISM 2023
- 개최지
- 부산 해운대