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A novel solution for next-generation EUV pellicle: breathable membrane with increased transmittance
- 제목
- A novel solution for next-generation EUV pellicle: breathable membrane with increased transmittance
- 저자
- 안진호
- 발행일
- 2024-02-28
- 학회명
- 2024 SPIE Advanced Lithography + Patterning
- 개최지
- 미국