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The study of the electric characteristics of a-IGZO TFT with TiN/Cu electrode depending on the thickness of TiN as adhesion layer

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The study of the electric characteristics of a-IGZO TFT with TiN/Cu electrode depending on the thickness of TiN as adhesion layer
저자
전형탁
발행일
2012-05-18
학회명
춘계재료학회
개최지
한국

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