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Comparison of TiN thin films deposited by metal organic atomic layer deposition (MOALD) using TDMAT and TDEAT

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제목
Comparison of TiN thin films deposited by metal organic atomic layer deposition (MOALD) using TDMAT and TDEAT
저자
전형탁
발행일
2002-04-04
학회명
MRS 2002 spring meeting
개최지
SAN FRANCISCO

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