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Effect of hydroxcyl Ethyl Cellulose Concentration in Colloidal Silica Slurry on Surface Roughness for Poly-Si Chemical Mechanical Polishing
- 제목
- Effect of hydroxcyl Ethyl Cellulose Concentration in Colloidal Silica Slurry on Surface Roughness for Poly-Si Chemical Mechanical Polishing
- 저자
- 백운규
- 발행일
- 2008-06-20
- 학회명
- 한국전기전자재료학회 2008 하계학술대회
- 개최지
- 속초 한화리조트