Thermoelectric Properties of Multi-stack Al Doped ZnO Layer Structure Using Atomic Layer Deposition

제목
Thermoelectric Properties of Multi-stack Al Doped ZnO Layer Structure Using Atomic Layer Deposition
저자
박진성
발행일
2015-06-29
학회명
15th International Conference on Atomic Layer Deposition
개최지
Potland, Oregon USA