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Capacitive Micromachined Ultrasonic Transducer without Bias Voltage by using Dielectric Charging Effect
- 제목
- Capacitive Micromachined Ultrasonic Transducer without Bias Voltage by using Dielectric Charging Effect
- 저자
- 박관규
- 발행일
- 2019-04-05
- 학회명
- 2019, The 21st Korean MEMS Conference
- 개최지
- 제주 KAL 호텔